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Relaxed Si1−xGex films with reduced dislocation densities grown by molecular beam epitaxy

Materials EngineeringMaterials ScienceEngineeringDislocation InteractionApplied PhysicsThin FilmsMolecular Beam EpitaxyEpitaxial GrowthRelaxed Si1−xgex FilmsSilicon On InsulatorReduced Dislocation Densities