A low-current liquid metal ion source

A. E. Bell, K. S. Rao, G. A. Schwind, L. W. Swanson

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 35 citations · 0 references

Concepts

Abstract

Liquid metal ion sources (LMIS’s) of gallium operating at 300 K and at currents down to 1 nA have been investigated. The mechanism of operation of the LMIS at low currents is believed to be that of the usual Taylor cone mode. Values of the full width at half-maximum of the energy spread, in the very low current range, 3 nA–1 μA, at 300 K did not decline below 4.5 eV as the emission current was reduced. Angular intensity measurements were also obtained in the emission current range.