Publication | Closed Access
Epitaxial growth of GaN films on unconventional oxide substrates
38
Citations
96
References
2014
Year
Materials EngineeringMaterials ScienceElectrical EngineeringWide-bandgap SemiconductorEngineeringEpitaxial GrowthNanoelectronicsUnconventional Oxide SubstratesApplied PhysicsAluminum Gallium NitrideGan Power DeviceGallium OxideMicroelectronicsOptoelectronicsCategoryiii-v SemiconductorGan Films
The unconventional oxide substrates have been used for the growth of high-quality GaN films due to their relatively small lattice and thermal expansion coefficient mismatches with GaN. This review focuses on the recent progress and discusses the perspectives of the epitaxial growth of GaN films on unconventional oxide substrates.
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