Impedance spectroscopy characterization of resistance switching NiO thin films prepared through atomic layer deposition

Abstract

To understand electrical/dielectric phenomena and the origins of bistable resistive switching, impedance spectroscopy was applied to NiO thin films prepared through atomic layer deposition. The dc current-voltage characteristics of the NiO thin films were also determined. Frequency-dependent characterizations indicated that the switching and memory phenomena in NiO thin films did not originate from the non-Ohmic effect at the electrode/NiO interfaces but from the bulk-related responses, i.e., from an electrocomposite where highly conducting components are distributed in the insulating NiO matrix. Low dielectric constants and bias-independent capacitance appeared to corroborate the bulk-based responses in resistive switching in NiO thin films.