Concepedia

Publication | Closed Access

Highly reliable O-ring packaging concept for MEMS pressure sensors

DOI

18

Citations

2

References

2004

Year

Christoffer Mølleskov Pedersen, S.T. Jespersen, Karsten W. Jacobsen, J.P. Krog, Carsten Christensen, Erik Vilain Thomsen
Sensors and Actuators A Physical

References

YearCitations

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