Publication | Open Access
Aspects of the surface roughness of ceramic bonding tools on a nanometer scale investigated with atomic force microscopy
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Citations
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References
1994
Year
Materials ScienceEngineeringMicrofabricationSurface RoughnessContact MechanicSurface ScienceApplied PhysicsCeramic Bonding ToolsScanning Force MicroscopyNanometer ScaleCeramic MaterialNanotribologyMicrostructure
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