Processing advances in transparent Foturan® MEMS - Concepedia

Concepedia

Publication | Closed Access

Processing advances in transparent Foturan® MEMS

21

Citations

8

References

2010

Year

John D. Williams, Cédric Schmidt, Darwin K. Serkland

Applied Physics A

Materials ScienceEngineeringMicrofabricationTransparent MaterialsMicroelectromechanical SystemsMicro TechnologyMicro-electromechanical SystemTransparent Foturan® Mems

References

	Year	Citations

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