Study of photothermal vibrations of semiconductor cantilevers near the resonant frequency

Adsorption-induced surface stress and its effects on resonance frequency of microcantilevers

G. Y. Chen, Thomas Thundat, Eric A. Wachter et al. · Journal of Applied Physics · 1995 · 539 citations

Engineering, Materials Engineering, Materials Science +17

Regulation of a microcantilever response by force feedback

Jérôme Mertz, Othmar Marti, J. Mlynek · Applied Physics Letters · 1993 · 265 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +16

Photoacoustic frequency transmission technique: Electronic deformation mechanism in semiconductors

D. M. Todorović, P.M. Nikolić, A. I. Bojičić · Journal of Applied Physics · 1999 · 248 citations

Natural Sciences, Materials Science, Physics +14

Photothermal and electronic elastic effects in microelectromechanical structures

D. M. Todorović · Review of Scientific Instruments · 2003 · 97 citations

Engineering, Materials Science, Mechanical Engineering +17

Silicon resonant microcantilevers for absolute pressure measurement

Stefano Bianco, Matteo Cocuzza, Sergio Ferrero et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 90 citations · Full text

Engineering, Materials Engineering, Materials Science +17