Plasma deposition of hydrogenated diamond-like carbon films from CH4-Ar mixtures - Concepedia

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Plasma deposition of hydrogenated diamond-like carbon films from CH4-Ar mixtures

31

Citations

14

References

2004

Year

G. Cicala, P. Bruno, Aurora M. Losacco, G. Mattei

Surface and Coatings Technology

Materials ScienceDiamond-like CarbonChemical EngineeringEngineeringCarbon-based MaterialCh4-ar MixturesHydrogenChemistryChemical Vapor DepositionPlasma Processing

References

	Year	Citations

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