Concepedia

Cu3N films prepared by the low-pressure r.f. supersonic plasma jet reactor: Structure and optical properties

F. Fendrych, L. Soukup, L. Jastrabı́k, M. Šı́cha, Zdeněk Hubička, D. Chvostová, Alexander Tarasenko, V. Studnička, Timo Wagner

Diamond and Related Materials · 1999 · 36 citations · 5 references

DOI

Concepts

References

5

Cu<sub>3</sub>N Thin Film for a New Light Recording Media

K. Umeda, Akira Tasaki · Japanese Journal of Applied Physics · 1990 · 172 citations

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Copper nitride thin films prepared by radio-frequency reactive sputtering

Toshiro Maruyama, Tomonori Morishita · Journal of Applied Physics · 1995 · 148 citations · Full text

, , +17

Thin film processing by radio frequency hollow cathodes

Ladislav Bárdoš, Hana Baránková, S. Berg · Surface and Coatings Technology · 1997 · 32 citations

, , +11

Germanium nitride layers prepared by supersonic r.f. plasma jet

L. Soukup, V. Peřina, L. Jastrabı́k et al. · Surface and Coatings Technology · 1996 · 29 citations

, , +9

A Study of the Gas Flow in the RF Low‐Pressure Supersonic Jet Plasma Chemical System

M. Tichý, Ladislav Bárdoš, L. Soukup et al. · Contributions to Plasma Physics · 1994 · 21 citations

, , +16