Epitaxial growth of oxide films (La–Ca–Mn–O and Y–Ba–Cu–O) by the facing-target sputtering technique

Epitaxial growth of single-crystal (La,Ca)MnO3 thin films

Xiaofei Zeng, H. K. Wong · Applied Physics Letters · 1995 · 57 citations

Engineering, Crystal Growth Technology, Halide Perovskites +16

An ultrahigh vacuum, magnetron sputtering system for the growth and analysis of nitride superlattices

Paul B. Mirkarimi, M. Shinn, Scott A. Barnett · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 50 citations

Materials Science, Magnetron Sputtering System, Boron Nitride +15

Preparation of strontium titanate thin film on Si substrate by radio frequency magnetron sputtering

Neung-Ho Cho, Seung-Hee Nam, Ho‐Gi Kim · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 18 citations

Materials Science, Si Substrate, Engineering +14

Effect of process parameters on glow discharge and film thickness uniformity in facing target sputtering

Siddhartha S. Nathan, G.K. Muralidhar, G. Mohan Rao et al. · Thin Solid Films · 1997 · 12 citations

Electrical Engineering, Target Sputtering, Engineering +7