Publication | Closed Access
A single-crystal silicon micromirror for large bi-directional 2D scanning applications
46
Citations
24
References
2005
Year
Wafer Scale ProcessingEngineeringMicrofabricationMicroscopyApplied PhysicsBiomedical EngineeringIntegrated CircuitsMicro-optical ComponentMicroelectronicsNanolithography MethodMicro-electromechanical SystemSingle-crystal Silicon Micromirror
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