Interdigitated microelectrode arrays based on sputtered carbon thin-films - Concepedia

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Publication | Open Access

Interdigitated microelectrode arrays based on sputtered carbon thin-films

DOI Full Paper Access

45

Citations

22

References

1996

Year

G. C. Fiaccabrino, X.-M. Tang, N. Skinner, Ν. F. de Rooij, M. Koudelka‐Hep

Sensors and Actuators B Chemical

Materials ScienceElectrical EngineeringEngineeringMicrofabricationNanoelectronicsNano Electro Mechanical SystemThin FilmsSputtered Carbon Thin-filmsMicroelectronicsThin Film Processing

References

	Year	Citations

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