Concepedia

Quantitative analysis of silicon- and aluminium-oxynitride films with EPMA, SIMS, hf-SNMS, hf-GD-OES and FT-IR

Fresenius Journal of Analytical Chemistry · 1999 · 16 citations · 0 references

Concepts

Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationMaterials ChemistryThin FilmsElectronic Material CharacterizationOxide SemiconductorsSemiconductor Device MaterialsSemiconductor Thin FilmsSilicon MaterialsThin-film MaterialsSemiconductor CharacterizationSemiconductor Oxide Thin FilmsSilicon Thin FilmsThin Film Surface CharacterizationThin Oxide Films