Intermixing of Al<i>x</i>Ga1−<i>x</i>As/GaAs superlattices by pulsed laser irradiation

Abstract

Intermixing of AlxGa1−xAs/GaAs superlattices is demonstrated utilizing laser pulses of a few nanosecond duration. Raman spectroscopy and sputter Auger profiling have been used to assess the degree of intermixing and residual damage in the laser irradiated samples. The results indicate that irradiating with the spatially uniform beam of the excimer laser generates a completely intermixed alloy with no detected residual damage. A thermal melting model is used to qualitatively describe the results.