Traceable measurement of surface texture at the National Physical Laboratory using NanoSurf IV

Abstract

A new surface texture measuring instrument, known as NanoSurf IV, has been developed at the National Physical Laboratory. Laser interferometers provide traceable displacement measurements in both the vertical and scanning axes enabling surface texture to be measured with nanometre uncertainty. NanoSurf IV has a vertical range of 10 µm and horizontal range of 100 mm. The instrument is designed to calibrate surface texture standard specimens that can, in turn, be used to calibrate other instruments. The design of the instrument, its calibration and results obtained from surface texture calibration artefacts are presented.