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Design of experiments based factorial design and response surface methodology for MEMS optimization

Factorial DesignMemetic AlgorithmEngineeringMicrofabricationResponse Surface MethodologyMechatronicsDesignMechanical SystemsOptimal Experimental DesignSystems EngineeringDevice DesignModeling And SimulationMems OptimizationStructural OptimizationMicro-electromechanical System