Publication | Closed Access
Modification of AZO thin-film properties by annealing and ion etching
19
Citations
5
References
2009
Year
Materials ScienceMaterials EngineeringAzo Thin-film PropertiesEngineeringOxide ElectronicsSurface ScienceApplied PhysicsThin Film Process TechnologyThin FilmsMicroelectronicsPlasma EtchingChemical Vapor DepositionThin Film Processing
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