Plasma Deposition, Properties and Structure of Amorphous Hydrogenated Carbon Films - Concepedia

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Plasma Deposition, Properties and Structure of Amorphous Hydrogenated Carbon Films

264

Citations

0

References

1991

Year

P. Koidl, C. Wild, B. Dischler, Jürgen Wagner, M. Ramsteiner

Materials science forum

Materials SciencePlasma DepositionEngineeringCarbon-based MaterialApplied PhysicsChemical Vapor DepositionHydrogenThin FilmsAmorphous SolidPlasma Processing

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