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Silicon made resonant microcantilever: Dependence of the chemical sensing performances on the sensitive coating thickness

Materials ScienceEngineeringMicrofabricationNanotechnologyMaterials FabricationApplied PhysicsResonant MicrocantileverNano Electro Mechanical SystemMicroscale SystemMicroelectronicsSensitive Coating ThicknessMicro-electromechanical SystemMicrofluidics