Publication | Open Access
Realization of a diamond based high density multi electrode array by means of Deep Ion Beam Lithography
26
Citations
28
References
2015
Year
Materials ScienceDiamond-like CarbonElectrical EngineeringEngineeringElectron-beam LithographyBeam LithographyMicrofabricationNanoelectronicsApplied PhysicsIon BeamMicroelectronicsOptoelectronics
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