Fabrication and testing of custom vacuum encapsulations deposited by focused ion beam direct-write CVD - Concepedia

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Fabrication and testing of custom vacuum encapsulations deposited by focused ion beam direct-write CVD

15

Citations

14

References

2001

Year

Robert Puers, Steve Reyntjens

Sensors and Actuators A Physical

Materials ScienceIon ImplantationEngineeringMicrofabricationApplied PhysicsIon BeamVacuum DeviceElectronic PackagingCustom Vacuum EncapsulationsPlasma Processing

References

	Year	Citations

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