Publication | Closed Access
Properties of polysilicon films annealed by a rapid thermal annealing process
17
Citations
7
References
1992
Year
Materials ScienceMaterials EngineeringPolysilicon FilmsEngineeringMicrofabricationApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorChemical Vapor DepositionThin Film Processing
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