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Influence of RF power on the electrical and mechanical properties of nano-structured carbon nitride thin films deposited by RF magnetron sputtering

Materials ScienceNano-structured CarbonElectrical EngineeringBoron NitrideEngineeringCarbon-based MaterialHexagonal Boron NitrideNanomaterialsNanoelectronicsNanotechnologyCubic Boron NitrideApplied PhysicsThin FilmsRf PowerCarbon-based Films