Publication | Closed Access
Surface morphology of cubic SiC(100) grown on Si(100) by chemical vapor deposition
114
Citations
11
References
1986
Year
Materials ScienceEngineeringSurface ScienceApplied PhysicsCubic SicSemiconductor Device FabricationSilicon On InsulatorSurface MorphologyChemical Vapor DepositionCarbide
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