Publication | Closed Access
Miniature pressure sensor and micromachined actuator structure based on low-temperature-cofired ceramics and piezoelectric material
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Citations
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References
2004
Year
Materials ScienceEngineeringMicromachinesMicrofabricationMechanical EngineeringMicromachined Ultrasonic TransducerMiniature Pressure SensorPiezoelectric MaterialsActuationPiezoelectric MaterialMicroactuatorMicro-electromechanical SystemActuator Structure
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