Publication | Closed Access
Ablation of submicron structures on metals and semiconductors by femtosecond UV-laser pulses
75
Citations
9
References
1997
Year
Materials SciencePhotonicsAdvanced Laser ProcessingEngineeringPhysicsLaser Micro-processingOptical PropertiesSubmicron StructuresLaser-induced BreakdownApplied PhysicsLaser AblationLaser Processing TechnologyFemtosecond Uv-laser PulsesUltrafast Lasers
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