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Control of carbon in Czochralski silicon crystals

R.W. Series, K.G. Barraclough

Journal of Crystal Growth · 1983 · 13 citations · 1 references

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References

Concepts

Natural SciencesMaterials EngineeringMaterials ScienceCrystal StructureSemiconductor DevicesSemiconductor MaterialsCrystal ChemistryCrystal EngineeringCrystal SystemsCrystalline MaterialsSemiconductor Crystal GrowthSilicon MaterialsCrystalline SiliconCzochralski Crystal GrowthCzochralski Growth

References

1

Carbon contamination during growth of Czochralski silicon

R.W. Series, K.G. Barraclough · Journal of Crystal Growth · 1982 · 11 citations

Engineering, Materials Engineering, Materials Science +10