Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1982 · 16 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceOptical MaterialsOptoelectronicsThin FilmsOptical Thin FilmsOxide SemiconductorsSemiconductor Thin FilmsThin Film Optical PropertiesThin-film DepositionThin-film MaterialsContrastContrast RatioHeat Treatment EffectsOptical ConstantsThin Oxide FilmsThin Oxide LayersThin-film Optical CharacterizationThin-film Oxides
Thin films of SbOx, GeOx, TeOx, MoOx, InOx and PbOx ( x is smaller than the stoichiometric value for each component ) were found to have a feasibility to be applied to an optical recording disc. Upon heating, these thin films are critically changed in their optical constants at 150°, 280°, 120°, 150°, 120° and 100°C, respectively. The contrast ratios before to after heat treatment of the GeOx, TeOx and MoOx films of 1000 - 2000 Å thick are very high, they are 50, 20 and 15, respectively. Among them, the TeOx (x ≈1.1) film was excellent in both the sensitivity and the contrast ratio, and an optical recording disc was prepared by depositing the TeOx on a PMMA disc, substrate. Video-signals can be recorded and played back using a laser diode (λ =8300 Å, N.A.= 0.5) at the laser power of 6 - 8 mW incident. The carrier to noise ratio at 5 MHz was in excess of 55 dB.