High-frequency short-pulsed metal plasma-immersion ion implantation or deposition using filtered DC vacuum-arc plasma - Concepedia

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High-frequency short-pulsed metal plasma-immersion ion implantation or deposition using filtered DC vacuum-arc plasma

29

Citations

9

References

2006

Year

A. I. Ryabchikov, I.A. Ryabchikov, I.B. Stepanov, Yu.P. Usov

Surface and Coatings Technology

Electrical EngineeringIon ImplantationEngineeringGas Discharge PlasmaMicroelectronicsPlasma ProcessingPlasma Application

References

	Year	Citations

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