Concepedia

Electron-beam-generated plasmas for materials processing

S. G. Walton, Christopher Muratore, D. Leonhardt, R. F. Fernsler, David Blackwell, R. A. Meger

Surface and Coatings Technology · 2004 · 68 citations · 11 references

DOI

Concepts

References

11

Atomic and molecular processes

Journal of the Franklin Institute · 1962 · 1.6K citations

, , +12

Positive-ion bombardment of substrates in rf diode glow discharge sputtering

J. W. Coburn, E. Kay · Journal of Applied Physics · 1972 · 421 citations

, , +13

Absolute partial and total cross sections for electron-impact ionization of argon from threshold to 1000 eV

H. C. Straub, P. Renault, B. G. Lindsay et al. · Physical Review A · 1995 · 269 citations

, , +15

Theoretical overview of the large-area plasma processing system (LAPPS)

Wallace M. Manheimer, R. F. Fernsler, Mártin Lampe et al. · Plasma Sources Science and Technology · 2000 · 110 citations

, , +9

Production of large-area plasmas by electron beams

R. F. Fernsler, Wallace M. Manheimer, R. A. Meger et al. · Physics of Plasmas · 1998 · 101 citations

, , +16