Sensors and Actuators A Physical · 2001 · 62 citations · 13 references
EngineeringSoft RoboticsMicrofabricationCompliant Microleverage MechanismsMechanical EngineeringMechatronicsMechanical SystemsMicroactuatorStructural MechanicsMicro-electromechanical System
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Surface-micromachined resonant accelerometer
T.A. Roessig, Roger T. Howe, Albert P. Pisano et al. · 2002 · 177 citations
Surface-micromachined Resonant Accelerometer, Engineering, Mechanical Engineering +16