High-Coercive-Force Rare-Earth Alloy Films by Getter Sputtering

Abstract

Thin films of the rare-earth alloys of the Co–Sm system with and without the addition of Cu have been found to have exceptionally high coercive forces. A coercive force of 30 000 Oe was realized with Co3.65Cu1.35Sm films, 4000-Å thick prepared at a substrate temperature of 500°C using getter sputtering. This technique avoids troublesome oxidation problems usually encountered in preparing films of active materials such as the rare-earth compounds.