Matrix calculation of pressures in high-vacuum systems

Abstract

A matrix analysis method has been applied to two high-vacuum systems: an outgassing pipe and an electron microscope. These vacuum systems were analyzed as linear vacuum circuits with pressure sources, current sources, and conductances by using a digital computer. The pressures at six points along an outgassing pipe were calculated for two different models. A 5% difference of pressures was noted between the models. Pressures throughout an electron microscope high-vacuum system were also successfully calculated by a computer. The pressure varied over three orders of magnitude depending on position.