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An angle-resolved TOF study on the UV laser-induced etching of InP(100) surface with chlorine

Chemical EngineeringAdvanced Laser ProcessingEngineeringLaser PhotochemistryOptical PropertiesSurface ScienceApplied PhysicsLaser ApplicationsAngle-resolved Tof StudyLaser Processing TechnologyChemistryLaser-assisted DepositionUv Laser-induced EtchingLaser-surface InteractionsPlasma EtchingOptoelectronics