Integrated ferroelectrics · 1994 · 24 citations · 2 references
Natural SciencesMaterials EngineeringMaterials ScienceCeramicsMaterials ChemistryThin FilmsChemical Vapor DepositionSemiconductor Device MaterialsThin-film DepositionThin-film MaterialsBarium TitanateDeposition TechniquesFilm PurityLead Zirconate TitanateStrontium Barium TitanateThin Oxide Films
Abstract In 1991 we demonstrated the use of a deposition machine that injected liquid sol-gel material into a vacuum chamber at room temperature for the production of high quality lead zirconate titanate (PZT) thin films. This year we have modified the machine to produce strontium titanate and barium strontium titanate films of sufficient quality for DRAM applications.
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