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Analytical and finite element method design of quartz tuning fork resonators and experimental test of samples manufactured using photolithography 1—significant design parameters affecting static capacitance C0

Electrical EngineeringEngineeringMicrofabricationMechanical EngineeringStatic Capacitance C0Fork ResonatorsInstrumentationMicroelectronicsMicro-electromechanical SystemPhotolithography 1—Significant