Publication | Closed Access
Energy Level and Solid Solubility of Cobalt in Silicon by In-Depth Profile Measurement
14
Citations
1
References
1984
Year
Materials ScienceSolid SolubilityEngineeringNanotechnologySurface ScienceApplied PhysicsIntrinsic ImpuritySolid-state ChemistryEnergy LevelNanometrologyNanoscale ScienceIn-depth Profile MeasurementSilicon On Insulator
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