Ceramics International · 2004 · 37 citations · 19 references
Materials EngineeringMaterials ScienceSinteringEngineeringMicrofabricationApplied PhysicsRaw-si Particle SizeSemiconductor Device FabricationSilicon On InsulatorMicrostructure
19
On reactions between silicon and nitrogen
H. M. Jennings · Journal of Materials Science · 1983 · 229 citations