Thin Solid Films · 1998 · 10 citations · 4 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface EngineeringSurface ScienceAlloysHigh-temperature PlasmasPlasma Surface TreatmentPlasma-wall InteractionsThin-film DepositionInorganic SubstratesPlasma DepositionPlasma-enhanced Deposition
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Paul Weiser, Steven Prawer, A. Hoffman et al. · Journal of Applied Physics · 1992 · 54 citations
Natural Sciences, Materials Engineering, Materials Science +15