Surface Science · 1992 · 216 citations · 31 references
EngineeringMaterials EngineeringMaterials ScienceInterface ScienceSurface ChemistrySurface ScienceEtching ProcessesSemiconductor SurfacesSilicon MaterialsSurface ModificationSurface PhysicsThin Film EtchingChemical EtchingEtchingSurface EtchingWet Chemical EtchingWet Etching
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Ideal hydrogen termination of the Si (111) surface
G. S. Higashi, Yves J. Chabal, Gary W. Trucks et al. · Applied Physics Letters · 1990 · 1.4K citations
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