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Morphology of hydrogen-terminated Si(111) and Si(100) surfaces upon etching in HF and buffered-HF solutions

Materials ScienceSurface CharacterizationEngineeringHydrogen-terminated SiMicrofabricationBuffered-hf SolutionsSurface ScienceApplied PhysicsSurface AnalysisSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsPlasma Etching