Properties of TiN–TiC multilayer coatings using plasma-assisted chemical vapor deposition

Synthesis of TiN/TiCN/TiC layer systems on steel and cermet substrates by PACVD

K.‐T. Rie, A. Gebauer, J. Wöhle et al. · Surface and Coatings Technology · 1995 · 44 citations

Natural Sciences, Materials Engineering, Materials Science +12

TiC coatings prepared by pulsed laser deposition and magnetron sputtering

Jinke Tang, J.S. Zabinski, J.E. Bultman · Surface and Coatings Technology · 1997 · 33 citations

Natural Sciences, Materials Engineering, Materials Science +16

Influence of the PACVD process parameters on the properties of titanium carbide thin films

C. Jarms, H.‐R. Stock, H. Berndt et al. · Surface and Coatings Technology · 1998 · 24 citations

Natural Sciences, Materials Engineering, Materials Science +10

The effects of chlorine content on the properties of titanium carbonitride thin film deposited by plasma assisted chemical vapor deposition

Si Bum Kim, Si Kyung Choi, Soung Soon Chun et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 18 citations

Natural Sciences, Materials Engineering, Materials Science +13