Concepedia
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1997 · 13 citations · 8 references
EngineeringApplied PhysicsDamage ProductionSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsSilicon Debugging
8
Dose rate dependence of damage clustering during heavy ion irradiation in Si
O. W. Holland, D. Fathy, J. Narayan et al. · Radiation Effects · 1985 · 70 citations
Radiation Testing, Dose Rate Dependence, Ion Implantation +12
Energy loss of MeV carbon cluster ions in matter
Ch. Tomaschko, D. Brandl, R. Kügler et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1995 · 55 citations
Cluster Science, Engineering, Physics +6
Non-linear sputtering effects induced by MeV energy gold clusters
K. Boussofiane-Baudin, Alain Brunelle, Pierre Chaurand et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1994 · 49 citations
Damage production in Si by MeV carbon cluster irradiation
M. Döbeli, R.M. Ender, Ulrike Fischer et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1994 · 30 citations
Ion Implantation, Engineering, Applied Physics +2
Defect production by MeV cluster impacts
M. Döbeli, F. Ames, R.M. Ender et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1995 · 29 citations
Software Maintenance, Reliability Engineering, Engineering +7