Deformable magnetic mirror for adaptive optics: technological aspects

Technology and applications of micromachined adaptive mirrors

Gleb Vdovin, P.M. Sarro, S. Middelhoek · Journal of Micromechanics and Microengineering · 1999 · 38 citations

Natural Sciences, Physics, Optics +8

Fabrication of a magnetic transducer composed of a high-density array of microelectromagnets with on-chip electronics

F. Cardot, J. Gobet, M. Bogdanski et al. · Sensors and Actuators A Physical · 1994 · 26 citations

Engineering, Electrical Engineering, Materials Science +16

Structure and magnetic properties of sputtered Nd-Fe-B alloys

Ya.L. Linetsky · Journal of Materials Engineering and Performance · 1995 · 24 citations

Natural Sciences, Materials Engineering, Materials Science +13

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)

O. Cugat, Patrick Mounaix, Skandar Basrour et al. · 2000 · 23 citations

Engineering, Materials Science, Mechanical Engineering +14

Coplanar waveguides on dielectric membranes micromachinedon a GaAs substrate

Patrice Salzenstein, O. Dupuis, Mohammed H.S. Helal et al. · Electronics Letters · 1996 · 23 citations

Engineering, Electrical Engineering, Materials Science +17