Formation of ultra-smooth 45° micromirror on (100) silicon with low concentration TMAH and surfactant: Techniques for enlarging the truly 45° portion - Concepedia

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Formation of ultra-smooth 45° micromirror on (100) silicon with low concentration TMAH and surfactant: Techniques for enlarging the truly 45° portion

46

Citations

36

References

2010

Year

Yi Xu, Aron Michael, Chee Yee Kwok

Sensors and Actuators A Physical

EngineeringMicromachinesMicrofabricationLow Concentration TmahSurface ScienceApplied PhysicsUltra-smooth 45°Biomedical EngineeringMicro-optical ComponentSilicon On InsulatorMicroelectronics

References

	Year	Citations

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