Chemical Vapor Deposition of Nickel Oxide Films from Bis-π-Cyclopentadienyl-Nickel

Abstract

Bis-π-cyclopentadienyl nickel has been proposed as a source material for metalorganic chemical vapor deposition of nickel oxide films. The transparent film deposited at 310°C was of a NaCl-type crystal structure of NiO. The refractive index and optical bandgap were approximately 2.1 and 3.7 eV, respectively.