Homogeneity improvement of field emission beam from metallic nano-tip arrays by noble-gas conditioning

Abstract

The authors explored control of field-emission electron beam homogeneity emitted from metallic nano-tips fabricated by molding. Improved beam homogeneity and increased maximum bunch charge were observed after DC operation of cathodes in low-pressure argon gas environment. They also observed average current per tip of 4.5 μA from a 1 × 104 emitter array device after conditioning in neon gas. Evolution of Fowler-Nordheim parameters as a result of noble-gas conditioning was discussed.