Application of SiO2 aerogel film for interlayer dielectric on GaAs with a barrier of Si3N4 - Concepedia

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Application of SiO2 aerogel film for interlayer dielectric on GaAs with a barrier of Si3N4

14

Citations

13

References

2004

Year

Sang-Bae Jung, Sung-Woo Park, Jun-Kyu Yang, Hyung‐Ho Park, Haecheon Kim

Thin Solid Films

Materials EngineeringMaterials ScienceElectrical EngineeringEngineeringSilicon On InsulatorApplied PhysicsSemiconductor MaterialInterlayer DielectricMolecular Beam EpitaxyCompound SemiconductorSio2 Aerogel Film

References

	Year	Citations

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