The top-down fabrication of a 3D-integrated, fully CMOS-compatible FET biosensor based on vertically stacked SiNWs and FinFETs - Concepedia

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The top-down fabrication of a 3D-integrated, fully CMOS-compatible FET biosensor based on vertically stacked SiNWs and FinFETs

DOI Full Paper Access

36

Citations

50

References

2013

Year

Elizabeth Buitrago, Montserrat Fernández-Bolaños, Sara Rigante, Christian Zilch, Nicole Schröter, Adrian M. Nightingale, Adrian M. Ionescu

Sensors and Actuators B Chemical

Electrical EngineeringEngineeringImplantable SensorBiosensing SystemsNanotechnologyNanoelectronicsBioelectronicsTop-down FabricationBiomedical EngineeringSensor DesignNanosensorCmos-compatible Fet BiosensorMicroelectronics

References

	Year	Citations

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