Publication | Closed Access
Electronic sputtering of thin SiO2 films by MeV heavy ions
48
Citations
20
References
2003
Year
Materials EngineeringMaterials ScienceEngineeringNanoelectronicsSurface ScienceApplied PhysicsVacuum DeviceThin FilmsSilicon On InsulatorMicroelectronicsChemical Vapor DepositionThin Film ProcessingElectronic Sputtering
| Year | Citations | |
|---|---|---|
Page 1
Page 1